
SEM Specimen Preparation

PECS II System
Broad argon ion beam system designed to polish and coat samples for SEM imaging and analytical techniques.
Advantages:
Fully automated argon ion polishing system suitable for preparation of SEM samples to prepare damage free surfaces, cross sections and deposit coatings to protect or eliminate charging.
- Polish, etch or coat samples with a single pump down
- Etch at voltages as low as 100 V for rapid and damage free preparation of sample surfaces
- Permit samples as large as 32 mm in diameter
- Transfer samples from the PECS™ II instrument to a SEM/FIB or glovebox without exposure to air (optional)
- Store and analyze image in DigitalMicrograph® software from Gatan for digital optical imaging
- Display and control all PECS II parameters using integrated 10-inch color touch screen

Ilion II System
Ideal for low energy surface preparation for your SEM cross section viewing.
Advantages:
- Vacuum load-lock and liquid nitrogen cold stage to provide rapid workflows on beam sensitive samples
- Real-time observation of the polishing process including an optical microscope with digital imaging; images can be stored and analyzed with DigitalMicrograph® software from Gatan
- Repeatable results from recipes and operation of the Ilion™ II via a 10" color touch screen interface
- Damage-free surfaces for analytical techniques, such as cathodoluminescence and EBSD, where the signal is generated near the surface
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