Field Emission SEMs

The JSM-IT710HR Field Emission SEM is a compact, versatile Schottky Field Emission SEM that delivers the next level of intelligent technology for high spatial resolution imaging and analysis.

Our unique in-lens field emission gun and advanced electron optics deliver large probe currents while maintaining a small probe making this microscope ideally suited for high resolution applications. This highly versatile SEM is compact in design yet is equipped with a large chamber and both High and Low Vacuum modes for managing a wide variety of specimen types in their native state.

Smart – Flexible - Powerful

Smart – Accessible at any level with the latest innovations from JEOL’s intelligent technology. Best-in-class auto functions from alignment to focus delivers clear, high-resolution images in seconds. The workflow is fast with Zeromag, using our built-in optical camera for navigation and seamless transition to SEM imaging. View Live EDS both spectrum and X-ray maps with our analytical models. We’ve taken it to the next level by including Automation, from Montage (large area mosaics) to Simple SEM for automatic image collection at multiple locations, magnifications, and conditions. All this technology is packed into a compact platform for unprecedented ease-of-use.

Flexible – The JSM-IT710HR is equipped with a large specimen chamber with multiple ports that are optimally positioned for analytical attachments such as: multiple EDS, EBSD (co-planar with EDS), WDS, CL, STEM, heating/cooling sub-stages etc. There is a large, internal, mechanically eucentric stage with the advantage of easy placement of large and heavy specimens and arranging their orientation prior to closing the door and evacuating the chamber.

Powerful – The combination of JEOL’s unique in-lens field emission gun with up to 300nA of beam current and the aperture angle control lens which optimizes large probe currents to the smallest probe diameter delivers high spatial resolution imaging and analytical results. Our high-sensitivity, quadrant BSE detector provides a Live 3D surface reconstruction enhancing your view of specimens with complex topography. Analytical models include JEOL’s fully embedded EDS system for Real-Time, Live EDS spectra and Live X-ray maps. Built-in automation both streamlines and enhances throughput and internal Data Management software links all data for instant view of analysis locations. This SEM also supports live web viewing and remote control and is open to Python scripting.

Features:

• In-lens Schottky field emission gun delivers ≥300nA to the specimen
• Advanced auto functions including beam alignment, focus, astigmatism correction
• Large specimen chamber with multiple ports
• Mechanically eucentric, large, specimen stage mounted in the chamber
• Zeromag – Simplifies navigation providing a seamless transition from an optical to SEM image. All data is linked: color image – SEM images – EDS data for map of all analysis locations.
• Live Analysis – Full integration of JEOL EDS with Real-Time Live spectrum and Live X-ray map
• Automation. Montage – Automate multiple large area image mosaics (stitching) and EDS maps (analytical models). Simple SEM – simplify workflow and automate routine imaging. Recipes for multiple kV, detector, magnifications and more!
• High Vacuum and Low Vacuum models for any sample type. Easy one click transition from High to Low vacuum.
• Specimen Exchange – Integrated step-by-step guide from specimen introduction to automatic image formation. Unprecedented Ease of Use at any level!
• Small footprint and easy maintenance (no cooling water required)

The JEOL IT800 Ultrahigh Resolution Field Emission SEM is a a revolutionary FE-SEM with the most advanced high-resolution analytical technology available today. The JEOL IT800 series offers the next level of analytical intelligence for high spatial resolution imaging and analysis at the nanoscale.

Smart-Flexible-Powerful

Smart - The IT800 series of Schottky Field Emission SEMs with embedded JEOL Energy Dispersive X-ray (EDS) streamlines operation and workflow efficiency. Elegant functionality, ultrahigh resolution, and powerful software enable seamless acquisition of data from observation to elemental analysis and subsequent reporting.

The JEOL NEOENGINE® electron beam control system and advanced auto functions provide fast transitions between high resolution imaging and high current analyses, without sacrificing performance, resulting in unprecedented ease of use. Advanced AI algorithms optimize control of electron lenses in real time, correct electron trajectories and automatically align the beam, all while correcting focus, brightness/contrast, and astigmatism. Live EDS analysis allows direct monitoring of specimen chemical composition during imaging.

The JEOL SEM seamlessly integrates optical imaging and navigation, SEM imaging, and EDS Live Analysis with one-click operation.

Flexible - The JSM-IT800 series is equipped with a large specimen chamber that accommodates a wide variety of detectors simultaneously, including: multiple EDS, WDS, STEM, BSE, and CL. JEOL’s unique Soft X-ray Emission Spectrometer allows efficient and parallel collection of very low-energy X-rays while providing unprecedented chemical state analysis.

Powerful - The IT800SHL is JEOL’s flagship FE SEM with sub-nm resolution, up to 2,000,000X magnification and an accelerating voltage range of 0.01 to 30kV, making it possible to acquire stunning details of nanostructures alongside comprehensive elemental analysis.  This highly versatile, easy-to-use field emission SEM offers the next level of analytical intelligence in FE-SEM.

High Spatial Resolution

The JSM-IT800 utilizes a hybrid objective lens that combines electromagnetic and electrostatic lenses with through-the-lens electron detection system. With no electromagnetic leakage below the lens it is ideal for imaging magnetic materials and analyzing samples with EBSD. The integration of in-the-lens acceleration and deceleration of the electron beam results in minimization of the effects of lens aberrations at low kV, yielding higher resolution at the lowest accelerating voltages.

Unique to the SHL version, the new Upper Hybrid Detector (UHD) provides excellent S/N and detection efficiency of electrons emitted by the specimen, without specimen bias.

The JSM-IT800 employs a beam deceleration mode (BD mode) to decrease charging during imaging of nonconductive specimens, improve resolution at low kV and enhance surface topography by allowing accelerating voltages as low as 0.01kV.

The combination of the JEOL’s unique in lens field emission gun which allows for up to 500nA of beam current deliverable to the sample and the aperture angle control lens (ACL) which optimizes large probe currents into the smallest probe diameter, makes this microscope ideally suited for both imaging and analysis of nanostructures.

New BSE Detectors for Increased Sensitivity

In addition to solid state BSE detectors (BED), a scintillator (SBED) and versatile multi-segmented (VBED) detectors are also available to increase response, sensitivity and signal selection from different detection angles and construct 3D images of the sample.

Features:

• Versatile electromagnetic/electrostatic hybrid lens design for outstanding imaging and analysis performance
• NEOENGINE – intelligent automated electron beam control
• Advanced auto functions including beam alignment, focus, and stigmation
• In-lens field emission gun
• Aperture Angle Control Lens (ACL) for superb resolution at any kV or probe current
• Beam Deceleration (BD) mode reduces effects of lens aberrations at the sample
• Large specimen chamber with multiple ports
• Montage images and elemental maps
• Smile View Lab for data management and report generation
• Live Analysis with integrated JEOL EDS elemental screening
• High spatial resolution imaging and analysis of nanostructures