Sputter and Carbon Coaters

The MiniQS is ideally suited to the budget-conscious user who also demands reproducible results in an easy-to-use instrument. The MiniQS uses a Magnetron sputtering head with a simple to replace disc target.

Features

• Pre-set profiles with single-touch operation
• Sputter head is hinger for easy operation
• Fitted with safety interlocks
• Detachable chamber with implosion guard and top-plate allowing for easy cleaning
• Users can rapidly change the chamber to avoid cross-contamination
• Automatic operation with minimal user intervention required
• Compact sized; ideal for use benchtop SEMs
• Range of noble target options to suit majority of applications, including forensics
• Possibility of coating samples to 50mm diameter

The RotaQ is an automated and versatile rotary pumped coater offering
unparalleled ease of use. Recommended for sample preparation for
the examination of specimens using Electron Microscopy (EM).

Available in 3 configurations based on your application needs:

RotaQ S

Sputter coater for noble metals. Au target offered as standard. Au/Pd, Ag, Pt, Pt/Pd, Pd available as options.

RotaQ E

Evaporation coater for carbon/metal evaporation. Carbon fibre source offered as standard.

RotaQ ES

Combined coater offering both sputter coating and carbon and metal evaporation. Au target and carbon fibre source available as standard. Au/Pd, Ag, Pt, Pt/Pd, Pd
available as options.

Key Features:

• Recommended for low-medium magnification
• Suitable for use with Tungsten/LaB⁶ SEM and Benchtop SEM
• Rapid cycle time for maximum sample throughput
• Tilt stage design giving uniform coating of the complex 3D structures
• Film Thickness Monitor (FTM) to control deposition of coating
• Intuitive and responsive touchscreen colour panel design
• Multi-colour LED visual status indicator offering process updates
• Pre-set recipes for standard protocols resulting in sample reproducibility
• Customisable recipes for tailored applications
• Easy and quick set-up of profiles
• Multiple stage options based on application needs

The TurboQ is an automated and versatile turbo pumped coater offering unparalleled ease of use. Recommended for sample preparation for the examination of specimens using Electron Microscopy (EM).

Available in 3 configurations based on your application needs:

TurboQ S

Sputter coater for noble and/or oxidising metals. Cr target offered as standard.
Options available: Pt, Ir, Au, W, Au/Pd, Pd, Cu, Ag, Ti, Co, Sn, ITO, Mg, Ta, Fe, Al, Mo, Ni

TurboQ E

Evaporation coater for carbon/metal evaporation. Carbon rod
source offered as standard.

Options available: Carbon string

TurboQ ES

Combined coater offering both sputter coating and carbon and
metal evaporation. Cr target and carbon rod source available
as standard.

Options available: Pt, Ir, Au, W, Au/Pd, Pd, Cu, Ag, Ti, Co, Sn, ITO, Mg, Ta, Fe, Al, Mo, Ni

Options available: Carbon fibre

Key Features:

• High vacuum instrument for ultra-high-resolution EM up to and beyond 200k
• Ultra fine grain size for high-resolution analysis
• Rapid cycle time for maximum sample throughput
• Tilt stage design giving uniform coating of the complex 3D structures
• Film Thickness Monitor (FTM) to control deposition of coating
• Intuitive and responsive touchscreen colour panel design
• Multi-colour LED visual status indicator offering process updates
• Pre-set recipes for standard protocols resulting in sample reproducibility
• Customizable recipes for tailored applications
• Easy and quick set-up of profiles
• Multiple stage options based on application needs

Suitable for multi-layer sequential sputtering of two materials, the Q300T D Plus has two independent sputtering heads, which allows sequential sputtering of two metals without the need to break vacuum. The system is fully automated with user-defined recipes controlling the pumping sequence, time, number of sputter cycles, and the current used during the process. Unlimited layers of varying thickness from two target materials can be sputtered sequentially by cycling between both targets.  When not in use, the targets are shuttered for protection from contamination.

Key Features:

• Capable of achieving vacuum of 5x10⁻⁵ mbar
• Dual sputter head dual allows sequential coating of samples, up to 150 mm Ø, with two different metals without breaking vacuum
• Touch and swipe capacitive screen
• USB port for upgrades and download of process log files
• Multiple-user profiles can be set up on one instrument
• 16GB of memory can store more than 1000 recipes
• Multi-colour LED visual status indicator
• 1 x Chromium target and 1 x Gold target as standard
• Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt

The Q300T T Plus is a large chamber, turbo-pumped coating system, ideally suited for sputtering a single large diameter specimen up to 8″/200mm or multiple smaller specimens over a similar diameter. Ideal for thin-film applications and SEM/FE-SEM. It is fitted with three sputtering heads to ensure even deposition of individual large specimens or multiple specimens.

Key Features:

• Capable of achieving vacuum of 5x10⁻⁵ mbar
• Triple sputter head allows coating of samples up to 200 mm Ø
• Touch and swipe capacitive screen
• USB port for upgrades and download of process log files
• Multiple-user profiles can be set up on one instrument
• 16GB of memory can store more than 1000 recipes
• Multi-colour LED visual status indicator
• 3 x Chromium target as standard
• Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt

The Q300T ES Plus is a turbomolecular-pumped combined sputter and carbon coater suitable for coating samples up to 150 mm Ø.

Key Features:

• Capable of achieving vacuum of 5x10⁻⁵ mbar
• Single sputter head allows coating of samples up to 150 mm Ø
• Touch and swipe capacitive screen
• USB port for upgrades and download of process log files
• Multiple-user profiles can be set up on one instrument
• 16GB of memory can store more than 1000 recipes
• Multi-colour LED visual status indicator
• 1 x Chromium target as standard
• Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt
• Capable of carbon rod evaporation (carbon fibre evaporation available as option)